Reference Model based Data-driven Control of Power Amplifiers for High-precision Motion Systems

Duo Xu; Mihai Serban Popescu; Mircea Lazar

doi:10.1109/CCTA54093.2023.10252583

Reference Model based Data-driven Control of Power Amplifiers for High-precision Motion Systems

Duo Xu
, Mihai Serban Popescu
, Mircea Lazar

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

61 Downloads (Pure)

Abstract

Motivated by the increasing requirements in positioning precision for lithography applications, this paper analyzes how the position error in a high-precision motion system is affected by the response of the controlled power amplifier that drives the motor. Based on the analysis, guidelines for designing a reference model in continuous or discrete time that satisfies certain requirements that would decrease the overall position error are presented. Then, a data-driven control method, namely Virtual Reference Feedback Tuning (VRFT), is employed to directly synthesize both feedback and feedforward controllers based on the designed reference model. The position error of the motion system with the data-driven controlled power amplifier is compared to the case when classical industrial controllers are employed in the control of the amplifier. If adequate reference models are designed, the VRFT-controlled power amplifier can significantly decrease the position error such that it is close to the ideal position error. All of the presented results are based on simulations.

Original language	English
Title of host publication	2023 IEEE Conference on Control Technology and Applications, CCTA 2023
Publisher	Institute of Electrical and Electronics Engineers
Pages	798-803
Number of pages	6
ISBN (Electronic)	979-8-3503-3544-6
DOIs	https://doi.org/10.1109/CCTA54093.2023.10252583
Publication status	Published - 22 Sept 2023
Event	2023 IEEE Conference on Control Technology and Applications, CCTA 2023 - Bridgetown, Barbados Duration: 16 Aug 2023 → 18 Aug 2023

Conference

Conference	2023 IEEE Conference on Control Technology and Applications, CCTA 2023
Country/Territory	Barbados
City	Bridgetown
Period	16/08/23 → 18/08/23

Funding

This work is funded by the EU Horizon 2020 research project IT2 (IC Technology for the 2nm Node), Grant agreement ID: 875999. All authors are with the Control Systems Group, Department of Electrical Engineering, Eindhoven University of Technology, The Netherlands. E-mails: [email protected], [email protected], [email protected].

Funders	Funder number
European Union's Horizon 2020 - Research and Innovation Framework Programme	875999

Keywords

Data-driven control
High-precision power amplifiers
Motion control
Virtual reference feedback tuning

Access to Document

10.1109/CCTA54093.2023.10252583

pdfFinal published version, 1.55 MBLicence: TAVERNE

Cite this

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title = "Reference Model based Data-driven Control of Power Amplifiers for High-precision Motion Systems",

abstract = "Motivated by the increasing requirements in positioning precision for lithography applications, this paper analyzes how the position error in a high-precision motion system is affected by the response of the controlled power amplifier that drives the motor. Based on the analysis, guidelines for designing a reference model in continuous or discrete time that satisfies certain requirements that would decrease the overall position error are presented. Then, a data-driven control method, namely Virtual Reference Feedback Tuning (VRFT), is employed to directly synthesize both feedback and feedforward controllers based on the designed reference model. The position error of the motion system with the data-driven controlled power amplifier is compared to the case when classical industrial controllers are employed in the control of the amplifier. If adequate reference models are designed, the VRFT-controlled power amplifier can significantly decrease the position error such that it is close to the ideal position error. All of the presented results are based on simulations.",

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Xu, D, Popescu, MS & Lazar, M 2023, Reference Model based Data-driven Control of Power Amplifiers for High-precision Motion Systems. in 2023 IEEE Conference on Control Technology and Applications, CCTA 2023., 10252583, Institute of Electrical and Electronics Engineers, pp. 798-803, 2023 IEEE Conference on Control Technology and Applications, CCTA 2023, Bridgetown, Barbados, 16/08/23. https://doi.org/10.1109/CCTA54093.2023.10252583

Reference Model based Data-driven Control of Power Amplifiers for High-precision Motion Systems. / Xu, Duo; Popescu, Mihai Serban; Lazar, Mircea.
2023 IEEE Conference on Control Technology and Applications, CCTA 2023. Institute of Electrical and Electronics Engineers, 2023. p. 798-803 10252583.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Lazar, Mircea

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Y1 - 2023/9/22

N2 - Motivated by the increasing requirements in positioning precision for lithography applications, this paper analyzes how the position error in a high-precision motion system is affected by the response of the controlled power amplifier that drives the motor. Based on the analysis, guidelines for designing a reference model in continuous or discrete time that satisfies certain requirements that would decrease the overall position error are presented. Then, a data-driven control method, namely Virtual Reference Feedback Tuning (VRFT), is employed to directly synthesize both feedback and feedforward controllers based on the designed reference model. The position error of the motion system with the data-driven controlled power amplifier is compared to the case when classical industrial controllers are employed in the control of the amplifier. If adequate reference models are designed, the VRFT-controlled power amplifier can significantly decrease the position error such that it is close to the ideal position error. All of the presented results are based on simulations.

AB - Motivated by the increasing requirements in positioning precision for lithography applications, this paper analyzes how the position error in a high-precision motion system is affected by the response of the controlled power amplifier that drives the motor. Based on the analysis, guidelines for designing a reference model in continuous or discrete time that satisfies certain requirements that would decrease the overall position error are presented. Then, a data-driven control method, namely Virtual Reference Feedback Tuning (VRFT), is employed to directly synthesize both feedback and feedforward controllers based on the designed reference model. The position error of the motion system with the data-driven controlled power amplifier is compared to the case when classical industrial controllers are employed in the control of the amplifier. If adequate reference models are designed, the VRFT-controlled power amplifier can significantly decrease the position error such that it is close to the ideal position error. All of the presented results are based on simulations.

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ER -

Reference Model based Data-driven Control of Power Amplifiers for High-precision Motion Systems

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