Reducing residual vibrations through iterative learning control, with application to a wafer stage

C.L. Oosten, van; O.H. Bosgra; B.G. Dijkstra

Reducing residual vibrations through iterative learning control, with application to a wafer stage

C.L. Oosten, van, O.H. Bosgra, B.G. Dijkstra

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

This paper uses iterative learning control (ILC) to remove terminal residual vibrations. By carefully selecting the ILC observation and actuation windows, ILC brings the system to rest within a finite time interval using feedforward. Experiments conducted on an industrial high-precision set-up show that the vibrations can be removed well within half the period of the dominant vibration. Estimation of the vibration state from different experiments shows that ILC does indeed remove the residual vibrations. Analysis of the experimental results show that the feedforward profile obtained through ILC outperforms feedforward profiles obtained through simulation of LQ-state feedback and does not suffer from model uncertainty.

Original language	English
Title of host publication	Proceedings of the American Control Conference (ACC 2004), 30 June-2 July 2004, Boston, Massachusetts
Place of Publication	Piscataway, NJ
Publisher	Institute of Electrical and Electronics Engineers
Pages	5150-5155
Volume	6
ISBN (Print)	0-7803-8335-4
Publication status	Published - 2004
Event	2004 American Control Conference (ACC 2004), June 30-July 2, 2004, Boston, MA, USA - Boston, MA, United States Duration: 30 Jun 2004 → 2 Jul 2004

Conference

Conference	2004 American Control Conference (ACC 2004), June 30-July 2, 2004, Boston, MA, USA
Abbreviated title	ACC 2004
Country/Territory	United States
City	Boston, MA
Period	30/06/04 → 2/07/04

Cite this

@inproceedings{a1a62513e55c46edbd1999224e99d43e,

title = "Reducing residual vibrations through iterative learning control, with application to a wafer stage",

abstract = "This paper uses iterative learning control (ILC) to remove terminal residual vibrations. By carefully selecting the ILC observation and actuation windows, ILC brings the system to rest within a finite time interval using feedforward. Experiments conducted on an industrial high-precision set-up show that the vibrations can be removed well within half the period of the dominant vibration. Estimation of the vibration state from different experiments shows that ILC does indeed remove the residual vibrations. Analysis of the experimental results show that the feedforward profile obtained through ILC outperforms feedforward profiles obtained through simulation of LQ-state feedback and does not suffer from model uncertainty.",

author = "{Oosten, van}, C.L. and O.H. Bosgra and B.G. Dijkstra",

year = "2004",

language = "English",

isbn = "0-7803-8335-4",

volume = "6",

pages = "5150--5155",

booktitle = "Proceedings of the American Control Conference (ACC 2004), 30 June-2 July 2004, Boston, Massachusetts",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "2004 American Control Conference (ACC 2004), June 30-July 2, 2004, Boston, MA, USA, ACC 2004 ; Conference date: 30-06-2004 Through 02-07-2004",

}

Oosten, van, CL, Bosgra, OH & Dijkstra, BG 2004, Reducing residual vibrations through iterative learning control, with application to a wafer stage. in Proceedings of the American Control Conference (ACC 2004), 30 June-2 July 2004, Boston, Massachusetts. vol. 6, Institute of Electrical and Electronics Engineers, Piscataway, NJ, pp. 5150-5155, 2004 American Control Conference (ACC 2004), June 30-July 2, 2004, Boston, MA, USA, Boston, MA, United States, 30/06/04.

Reducing residual vibrations through iterative learning control, with application to a wafer stage. / Oosten, van, C.L.; Bosgra, O.H.; Dijkstra, B.G.
Proceedings of the American Control Conference (ACC 2004), 30 June-2 July 2004, Boston, Massachusetts. Vol. 6 Piscataway, NJ: Institute of Electrical and Electronics Engineers, 2004. p. 5150-5155.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Reducing residual vibrations through iterative learning control, with application to a wafer stage

AU - Oosten, van, C.L.

AU - Bosgra, O.H.

AU - Dijkstra, B.G.

PY - 2004

Y1 - 2004

N2 - This paper uses iterative learning control (ILC) to remove terminal residual vibrations. By carefully selecting the ILC observation and actuation windows, ILC brings the system to rest within a finite time interval using feedforward. Experiments conducted on an industrial high-precision set-up show that the vibrations can be removed well within half the period of the dominant vibration. Estimation of the vibration state from different experiments shows that ILC does indeed remove the residual vibrations. Analysis of the experimental results show that the feedforward profile obtained through ILC outperforms feedforward profiles obtained through simulation of LQ-state feedback and does not suffer from model uncertainty.

AB - This paper uses iterative learning control (ILC) to remove terminal residual vibrations. By carefully selecting the ILC observation and actuation windows, ILC brings the system to rest within a finite time interval using feedforward. Experiments conducted on an industrial high-precision set-up show that the vibrations can be removed well within half the period of the dominant vibration. Estimation of the vibration state from different experiments shows that ILC does indeed remove the residual vibrations. Analysis of the experimental results show that the feedforward profile obtained through ILC outperforms feedforward profiles obtained through simulation of LQ-state feedback and does not suffer from model uncertainty.

M3 - Conference contribution

SN - 0-7803-8335-4

VL - 6

SP - 5150

EP - 5155

BT - Proceedings of the American Control Conference (ACC 2004), 30 June-2 July 2004, Boston, Massachusetts

PB - Institute of Electrical and Electronics Engineers

CY - Piscataway, NJ

T2 - 2004 American Control Conference (ACC 2004), June 30-July 2, 2004, Boston, MA, USA

Y2 - 30 June 2004 through 2 July 2004

ER -

Reducing residual vibrations through iterative learning control, with application to a wafer stage

Abstract

Conference

Fingerprint

Cite this