Recent advancements in (plasma-assisted) ALD: from c-Si photovoltaics to direct-write patterning

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Abstract

Abstract only.

Original language	English
Title of host publication	Proceedings of the New Frontiers in Plasma Nanopatterning, 15-16 July 2010, Berkeley, CA, USA
Place of Publication	Berkeley, CA, USA
Publication status	Published - 2010
Event	conference; Workshop on New Frontiers in Plasma Nanopatterning; 2010-07-15; 2010-07-16 - Duration: 15 Jul 2010 → 16 Jul 2010

Conference	conference; Workshop on New Frontiers in Plasma Nanopatterning; 2010-07-15; 2010-07-16
Period	15/07/10 → 16/07/10
Other	Workshop on New Frontiers in Plasma Nanopatterning

@inproceedings{00d7c4861be44116a4ed08b711e76849,

title = "Recent advancements in (plasma-assisted) ALD: from c-Si photovoltaics to direct-write patterning",

abstract = "Abstract only.",

author = "W.M.M. Kessels",

year = "2010",

language = "English",

booktitle = "Proceedings of the New Frontiers in Plasma Nanopatterning, 15-16 July 2010, Berkeley, CA, USA",

note = "conference; Workshop on New Frontiers in Plasma Nanopatterning; 2010-07-15; 2010-07-16 ; Conference date: 15-07-2010 Through 16-07-2010",

}

TY - GEN

T1 - Recent advancements in (plasma-assisted) ALD: from c-Si photovoltaics to direct-write patterning

AU - Kessels, W.M.M.

PY - 2010

Y1 - 2010

N2 - Abstract only.

AB - Abstract only.

M3 - Conference contribution

BT - Proceedings of the New Frontiers in Plasma Nanopatterning, 15-16 July 2010, Berkeley, CA, USA

CY - Berkeley, CA, USA

T2 - conference; Workshop on New Frontiers in Plasma Nanopatterning; 2010-07-15; 2010-07-16

Y2 - 15 July 2010 through 16 July 2010

ER -