Recent advancements in (plasma-assisted) ALD: from c-Si photovoltaics to direct-write patterning

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Abstract

Abstract only.
Original languageEnglish
Title of host publicationProceedings of the New Frontiers in Plasma Nanopatterning, 15-16 July 2010, Berkeley, CA, USA
Place of PublicationBerkeley, CA, USA
Publication statusPublished - 2010
Eventconference; Workshop on New Frontiers in Plasma Nanopatterning; 2010-07-15; 2010-07-16 -
Duration: 15 Jul 201016 Jul 2010

Conference

Conferenceconference; Workshop on New Frontiers in Plasma Nanopatterning; 2010-07-15; 2010-07-16
Period15/07/1016/07/10
OtherWorkshop on New Frontiers in Plasma Nanopatterning

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