Real-time study of HWCVD a-Si:H film growth using spectroscopic second harmonic generation

W.M.M. Kessels, I.M.P. Aarts, J.J.H. Gielis, P.M.J. Grauls, C.M. Leewis, M.C.M. Sanden, van de

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Original languageEnglish
Title of host publication3rd international conference on hot-wire CVD (Cat-CVD) process : August 23-27, 2004, Utrecht, The Netherlands : extended abstracts
Place of PublicationS.n.
Publishers.n.
Pages247-250
Publication statusPublished - 2004

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Kessels, W. M. M., Aarts, I. M. P., Gielis, J. J. H., Grauls, P. M. J., Leewis, C. M., & Sanden, van de, M. C. M. (2004). Real-time study of HWCVD a-Si:H film growth using spectroscopic second harmonic generation. In 3rd international conference on hot-wire CVD (Cat-CVD) process : August 23-27, 2004, Utrecht, The Netherlands : extended abstracts (pp. 247-250). S.n.: s.n..