Original language | English |
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Title of host publication | 3rd international conference on hot-wire CVD (Cat-CVD) process : August 23-27, 2004, Utrecht, The Netherlands : extended abstracts |
Place of Publication | S.n. |
Publisher | s.n. |
Pages | 247-250 |
Publication status | Published - 2004 |
Real-time study of HWCVD a-Si:H film growth using spectroscopic second harmonic generation
W.M.M. Kessels, I.M.P. Aarts, J.J.H. Gielis, P.M.J. Grauls, C.M. Leewis, M.C.M. Sanden, van de
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
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