Real-time study of HWCVD a-Si:H film growth using optical second harmonic generation spectroscopy

I.M.P. Aarts, J.J.H. Gielis, P.M.J. Grauls, C.M. Leewis, M.C.M. Sanden, van de, W.M.M. Kessels

Research output: Contribution to journalArticleAcademicpeer-review

1 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Real-time study of HWCVD a-Si:H film growth using optical second harmonic generation spectroscopy'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy