Real-time spectroscopic studies on Si etch dynamics

A.A.E. Stevens, J.J.H. Gielis, M.C.M. Sanden, van de, H.C.W. Beijerinck, W.M.M. Kessels

Research output: Contribution to conference › Other › Academic

Original language	English
Publication status	Published - 2004
Event	51th International Symposium of the American Vacuum Society - Anaheim, CA, United States Duration: 14 Nov 2004 → 19 Nov 2004

Conference	51th International Symposium of the American Vacuum Society
Abbreviated title	AVS 51
Country/Territory	United States
City	Anaheim, CA
Period	14/11/04 → 19/11/04

Cite this

@conference{70c2da4b13cf4c27a829f74989293316,

title = "Real-time spectroscopic studies on Si etch dynamics",

author = "A.A.E. Stevens and J.J.H. Gielis and {Sanden, van de}, M.C.M. and H.C.W. Beijerinck and W.M.M. Kessels",

year = "2004",

language = "English",

note = "51th International Symposium of the American Vacuum Society, AVS 51 ; Conference date: 14-11-2004 Through 19-11-2004",

}