Real-time spectroscopic studies on Si etch dynamics

A.A.E. Stevens, J.J.H. Gielis, M.C.M. Sanden, van de, H.C.W. Beijerinck, W.M.M. Kessels

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2004
Event51th International Symposium of the American Vacuum Society - Anaheim, CA, United States
Duration: 14 Nov 200419 Nov 2004

Conference

Conference51th International Symposium of the American Vacuum Society
Abbreviated titleAVS 51
CountryUnited States
CityAnaheim, CA
Period14/11/0419/11/04

Cite this

Stevens, A. A. E., Gielis, J. J. H., Sanden, van de, M. C. M., Beijerinck, H. C. W., & Kessels, W. M. M. (2004). Real-time spectroscopic studies on Si etch dynamics. 51th International Symposium of the American Vacuum Society, Anaheim, CA, United States.
Stevens, A.A.E. ; Gielis, J.J.H. ; Sanden, van de, M.C.M. ; Beijerinck, H.C.W. ; Kessels, W.M.M. / Real-time spectroscopic studies on Si etch dynamics. 51th International Symposium of the American Vacuum Society, Anaheim, CA, United States.
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title = "Real-time spectroscopic studies on Si etch dynamics",
author = "A.A.E. Stevens and J.J.H. Gielis and {Sanden, van de}, M.C.M. and H.C.W. Beijerinck and W.M.M. Kessels",
year = "2004",
language = "English",
note = "51th International Symposium of the American Vacuum Society, AVS 51 ; Conference date: 14-11-2004 Through 19-11-2004",

}

Stevens, AAE, Gielis, JJH, Sanden, van de, MCM, Beijerinck, HCW & Kessels, WMM 2004, 'Real-time spectroscopic studies on Si etch dynamics' 51th International Symposium of the American Vacuum Society, Anaheim, CA, United States, 14/11/04 - 19/11/04, .

Real-time spectroscopic studies on Si etch dynamics. / Stevens, A.A.E.; Gielis, J.J.H.; Sanden, van de, M.C.M.; Beijerinck, H.C.W.; Kessels, W.M.M.

2004. 51th International Symposium of the American Vacuum Society, Anaheim, CA, United States.

Research output: Contribution to conferenceOtherAcademic

TY - CONF

T1 - Real-time spectroscopic studies on Si etch dynamics

AU - Stevens, A.A.E.

AU - Gielis, J.J.H.

AU - Sanden, van de, M.C.M.

AU - Beijerinck, H.C.W.

AU - Kessels, W.M.M.

PY - 2004

Y1 - 2004

M3 - Other

ER -

Stevens AAE, Gielis JJH, Sanden, van de MCM, Beijerinck HCW, Kessels WMM. Real-time spectroscopic studies on Si etch dynamics. 2004. 51th International Symposium of the American Vacuum Society, Anaheim, CA, United States.