Real-time spectroscopic studies on Si etch dynamics

A.A.E. Stevens, J.J.H. Gielis, M.C.M. Sanden, van de, H.C.W. Beijerinck, W.M.M. Kessels

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2004
Event51th International Symposium of the American Vacuum Society - Anaheim, CA, United States
Duration: 14 Nov 200419 Nov 2004

Conference

Conference51th International Symposium of the American Vacuum Society
Abbreviated titleAVS 51
CountryUnited States
CityAnaheim, CA
Period14/11/0419/11/04

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