Original language | English |
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Qualification | Doctor of Philosophy |
Awarding Institution | |
Supervisors/Advisors |
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Award date | 1 Jan 1992 |
Place of Publication | Eindhoven |
Publisher | |
Print ISBNs | 90-5282-180-1 |
Publication status | Published - 1992 |
Real-time spectroscopic ellipsometry
M.H.W. Verbruggen, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Korte onderzoekersopleiding Technische Natuurkunde
Research output: Thesis › EngD Thesis