Real time optical probes of ALD and CVD thin films for c-Si photovoltaics

W.M.M. Kessels; N.M. Terlinden; J.J.H. Gielis; E. Langereis; M.C.M. Sanden, van de

Real time optical probes of ALD and CVD thin films for c-Si photovoltaics

W.M.M. Kessels
, N.M. Terlinden
, J.J.H. Gielis
, E. Langereis
, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

Abstract only.

Original language	English
Title of host publication	Proceedings of the 5th International Conference on Spectroscopic Ellipsometry (ICSE-V), 23-28 May 2010, Albany, NY, USA
Place of Publication	Albany, NY, USA
Publication status	Published - 2010
Event	conference; 5th International Conference on Spectroscopic Ellipsometry (ICSE-V); 2010-05-25; 2010-05-25 - Duration: 25 May 2010 → 25 May 2010

Conference

Conference	conference; 5th International Conference on Spectroscopic Ellipsometry (ICSE-V); 2010-05-25; 2010-05-25
Period	25/05/10 → 25/05/10
Other	5th International Conference on Spectroscopic Ellipsometry (ICSE-V)

Cite this

@inproceedings{c6206809e7a0437ebb6f0fa0d460f60a,

title = "Real time optical probes of ALD and CVD thin films for c-Si photovoltaics",

abstract = "Abstract only.",

author = "W.M.M. Kessels and N.M. Terlinden and J.J.H. Gielis and E. Langereis and \{Sanden, van de\}, M.C.M.",

year = "2010",

language = "English",

booktitle = "Proceedings of the 5th International Conference on Spectroscopic Ellipsometry (ICSE-V), 23-28 May 2010, Albany, NY, USA",

note = "conference; 5th International Conference on Spectroscopic Ellipsometry (ICSE-V); 2010-05-25; 2010-05-25 ; Conference date: 25-05-2010 Through 25-05-2010",

}

Kessels, WMM, Terlinden, NM, Gielis, JJH, Langereis, E & Sanden, van de, MCM 2010, Real time optical probes of ALD and CVD thin films for c-Si photovoltaics. in Proceedings of the 5th International Conference on Spectroscopic Ellipsometry (ICSE-V), 23-28 May 2010, Albany, NY, USA. Albany, NY, USA, conference; 5th International Conference on Spectroscopic Ellipsometry (ICSE-V); 2010-05-25; 2010-05-25, 25/05/10.

Real time optical probes of ALD and CVD thin films for c-Si photovoltaics. / Kessels, W.M.M.; Terlinden, N.M.; Gielis, J.J.H. et al.
Proceedings of the 5th International Conference on Spectroscopic Ellipsometry (ICSE-V), 23-28 May 2010, Albany, NY, USA. Albany, NY, USA, 2010.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Real time optical probes of ALD and CVD thin films for c-Si photovoltaics

AU - Kessels, W.M.M.

AU - Terlinden, N.M.

AU - Gielis, J.J.H.

AU - Langereis, E.

AU - Sanden, van de, M.C.M.

PY - 2010

Y1 - 2010

N2 - Abstract only.

AB - Abstract only.

M3 - Conference contribution

BT - Proceedings of the 5th International Conference on Spectroscopic Ellipsometry (ICSE-V), 23-28 May 2010, Albany, NY, USA

CY - Albany, NY, USA

T2 - conference; 5th International Conference on Spectroscopic Ellipsometry (ICSE-V); 2010-05-25; 2010-05-25

Y2 - 25 May 2010 through 25 May 2010

ER -

Real time optical probes of ALD and CVD thin films for c-Si photovoltaics

Abstract

Conference

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