Real time optical probes of ALD and CVD thin films for c-Si photovoltaics

W.M.M. Kessels, N.M. Terlinden, J.J.H. Gielis, E. Langereis, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Abstract

Abstract only.
Original languageEnglish
Title of host publicationProceedings of the 5th International Conference on Spectroscopic Ellipsometry (ICSE-V), 23-28 May 2010, Albany, NY, USA
Place of PublicationAlbany, NY, USA
Publication statusPublished - 2010
Eventconference; 5th International Conference on Spectroscopic Ellipsometry (ICSE-V); 2010-05-25; 2010-05-25 -
Duration: 25 May 201025 May 2010

Conference

Conferenceconference; 5th International Conference on Spectroscopic Ellipsometry (ICSE-V); 2010-05-25; 2010-05-25
Period25/05/1025/05/10
Other5th International Conference on Spectroscopic Ellipsometry (ICSE-V)

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