Real-time monitoring of plasma oxidation dynamics of subnanometer Al2O3 barriers for magnetic tunnel junctions

C.G.C.H.M. Fabrie, C.A.M. Knechten, H.J.M. Swagten, B. Koopmans, W.J.M. Jonge, de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationProceedings of the NanoSpintronics NanoNed flagship, Scientific Day, 23 June 2005, Nijmegen, the Netherlands
Publication statusPublished - 2005

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