Real-time monitoring of plasma oxidation dynamics of subnanometer Al2O3 barriers for magnetic tunnel junctions

C.G.C.H.M. Fabrie, C.A.M. Knechten, H.J.M. Swagten, B. Koopmans, W.J.M. Jonge, de

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Proceedings of the NanoSpintronics NanoNed flagship, Scientific Day, 23 June 2005, Nijmegen, the Netherlands
Publication status	Published - 2005

Cite this

@inproceedings{854790d1d42649138877fd4b1e6f1a55,

title = "Real-time monitoring of plasma oxidation dynamics of subnanometer Al2O3 barriers for magnetic tunnel junctions",

author = "C.G.C.H.M. Fabrie and C.A.M. Knechten and H.J.M. Swagten and B. Koopmans and {Jonge, de}, W.J.M.",

year = "2005",

language = "English",

booktitle = "Proceedings of the NanoSpintronics NanoNed flagship, Scientific Day, 23 June 2005, Nijmegen, the Netherlands",

}

Proceedings of the NanoSpintronics NanoNed flagship, Scientific Day, 23 June 2005, Nijmegen, the Netherlands. 2005.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Real-time monitoring of plasma oxidation dynamics of subnanometer Al2O3 barriers for magnetic tunnel junctions

AU - Fabrie, C.G.C.H.M.

AU - Knechten, C.A.M.

AU - Swagten, H.J.M.

AU - Koopmans, B.

AU - Jonge, de, W.J.M.

PY - 2005

Y1 - 2005

M3 - Conference contribution

BT - Proceedings of the NanoSpintronics NanoNed flagship, Scientific Day, 23 June 2005, Nijmegen, the Netherlands

ER -