Real-time growth studies on the expanding thermal plasma deposited ZnO films by means of in situ spectroscopic ellipsometry

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	Proceedings 48th Annual Technical Conference - Society of Vacuum Coaters, 23-28 April 2005, Denver, Colorado, USA
Place of Publication	Albuquerque
Publisher	Society of Vacuum Coaters
Pages	534-539
Publication status	Published - 2005

Cite this

@inproceedings{0715673a25764d739b7e52ce3c7d02e5,

title = "Real-time growth studies on the expanding thermal plasma deposited ZnO films by means of in situ spectroscopic ellipsometry",

author = "I. Volintiru and M. Creatore and J.L. Linden and {Sanden, van de}, M.C.M.",

year = "2005",

language = "English",

pages = "534--539",

booktitle = "Proceedings 48th Annual Technical Conference - Society of Vacuum Coaters, 23-28 April 2005, Denver, Colorado, USA",

publisher = "Society of Vacuum Coaters",

}

Real-time growth studies on the expanding thermal plasma deposited ZnO films by means of in situ spectroscopic ellipsometry. / Volintiru, I.; Creatore, M.; Linden, J.L. et al.
Proceedings 48th Annual Technical Conference - Society of Vacuum Coaters, 23-28 April 2005, Denver, Colorado, USA. Albuquerque: Society of Vacuum Coaters, 2005. p. 534-539.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Real-time growth studies on the expanding thermal plasma deposited ZnO films by means of in situ spectroscopic ellipsometry

AU - Volintiru, I.

AU - Creatore, M.

AU - Linden, J.L.

AU - Sanden, van de, M.C.M.

PY - 2005

Y1 - 2005

M3 - Conference contribution

SP - 534

EP - 539

BT - Proceedings 48th Annual Technical Conference - Society of Vacuum Coaters, 23-28 April 2005, Denver, Colorado, USA

PB - Society of Vacuum Coaters

CY - Albuquerque

ER -