Reactive ion etching of GaN : results and morphology

F. Karouta, P. Vreugdewater, L.M.F. Kaufmann, O. Schön, H. Protzmann, M. Heuken

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProc. 3rd Annual Symposium of the IEEE/LEOS Benelux Chapter, INTEC, Gent, Belgium, 26 November 1998
Place of PublicationGent
PublisherUniversity of Gent
Pages169-172
ISBN (Print)90-76546-01-0
Publication statusPublished - 1998
Event3rd Annual Symposium of the IEEE/LEOS Benelux Chapter, November 26, 1998, Ghent, Belgium - Ghent, Belgium
Duration: 26 Nov 199826 Nov 1998

Conference

Conference3rd Annual Symposium of the IEEE/LEOS Benelux Chapter, November 26, 1998, Ghent, Belgium
CountryBelgium
CityGhent
Period26/11/9826/11/98

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