Reaction mechanisms during (plasma-assisted) atomic layer deposition processes

Research output: Contribution to conference › Other › Academic

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Abstract

No abstract.

Original language	English
Number of pages	1
Publication status	Published - 2009
Event	conference; Thin Film Nanomanufacturing Conference; 2009-11-25; 2009-11-25 - Duration: 25 Nov 2009 → 25 Nov 2009

Conference	conference; Thin Film Nanomanufacturing Conference; 2009-11-25; 2009-11-25
Period	25/11/09 → 25/11/09
Other	Thin Film Nanomanufacturing Conference

@conference{2f0f2ae7f2594dff971dd2fce325aeea,

title = "Reaction mechanisms during (plasma-assisted) atomic layer deposition processes",

abstract = "No abstract.",

author = "W.M.M. Kessels",

year = "2009",

language = "English",

note = "conference; Thin Film Nanomanufacturing Conference; 2009-11-25; 2009-11-25 ; Conference date: 25-11-2009 Through 25-11-2009",

}