Reaction mechanisms during (plasma-assisted) atomic layer deposition processes

Research output: Contribution to conferenceOther

1 Downloads (Pure)

Abstract

No abstract.
Original languageEnglish
Number of pages1
Publication statusPublished - 2009
Eventconference; Thin Film Nanomanufacturing Conference; 2009-11-25; 2009-11-25 -
Duration: 25 Nov 200925 Nov 2009

Conference

Conferenceconference; Thin Film Nanomanufacturing Conference; 2009-11-25; 2009-11-25
Period25/11/0925/11/09
OtherThin Film Nanomanufacturing Conference

Fingerprint

Dive into the research topics of 'Reaction mechanisms during (plasma-assisted) atomic layer deposition processes'. Together they form a unique fingerprint.

Cite this