Rapid thermal processing systems: oerview of capabilities and limitations

Fred Roozeboom

doi:10.1109/ICSMC.1993.384841

Rapid thermal processing systems: oerview of capabilities and limitations

Fred Roozeboom

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

This paper reviews the current status, problems and options in RTP system and process design. Some commercial systems will be discussed along with some improvements that can still be made in temperature reproducibility, process control and yield. This includes some recent developments in temperature reproducibility by compensated emissivity control.

Original language	English
Title of host publication	Proceedings of the IEEE International Conference on Systems, Man and Cybernetics
Place of Publication	Piscataway
Publisher	Institute of Electrical and Electronics Engineers
Pages	1-6
Number of pages	6
Volume	2
ISBN (Print)	0780309111
DOIs	https://doi.org/10.1109/ICSMC.1993.384841
Publication status	Published - 1 Dec 1993
Externally published	Yes
Event	1993 IEEE International Conference on Systems, Man and Cybernetics, SMC 1993 - Le Touquet, France Duration: 17 Oct 1993 → 20 Oct 1993

Conference

Conference	1993 IEEE International Conference on Systems, Man and Cybernetics, SMC 1993
Abbreviated title	SMC 1993
Country/Territory	France
City	Le Touquet
Period	17/10/93 → 20/10/93

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10.1109/ICSMC.1993.384841

Cite this

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title = "Rapid thermal processing systems: oerview of capabilities and limitations",

abstract = "This paper reviews the current status, problems and options in RTP system and process design. Some commercial systems will be discussed along with some improvements that can still be made in temperature reproducibility, process control and yield. This includes some recent developments in temperature reproducibility by compensated emissivity control.",

author = "Fred Roozeboom",

year = "1993",

month = dec,

day = "1",

doi = "10.1109/ICSMC.1993.384841",

language = "English",

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volume = "2",

pages = "1--6",

booktitle = "Proceedings of the IEEE International Conference on Systems, Man and Cybernetics",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "1993 IEEE International Conference on Systems, Man and Cybernetics, SMC 1993, SMC 1993 ; Conference date: 17-10-1993 Through 20-10-1993",

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Roozeboom, F 1993, Rapid thermal processing systems: oerview of capabilities and limitations. in Proceedings of the IEEE International Conference on Systems, Man and Cybernetics. vol. 2, Institute of Electrical and Electronics Engineers, Piscataway, pp. 1-6, 1993 IEEE International Conference on Systems, Man and Cybernetics, SMC 1993, Le Touquet, France, 17/10/93. https://doi.org/10.1109/ICSMC.1993.384841

Rapid thermal processing systems: oerview of capabilities and limitations. / Roozeboom, Fred.
Proceedings of the IEEE International Conference on Systems, Man and Cybernetics. Vol. 2 Piscataway: Institute of Electrical and Electronics Engineers, 1993. p. 1-6.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Roozeboom, Fred

PY - 1993/12/1

Y1 - 1993/12/1

N2 - This paper reviews the current status, problems and options in RTP system and process design. Some commercial systems will be discussed along with some improvements that can still be made in temperature reproducibility, process control and yield. This includes some recent developments in temperature reproducibility by compensated emissivity control.

AB - This paper reviews the current status, problems and options in RTP system and process design. Some commercial systems will be discussed along with some improvements that can still be made in temperature reproducibility, process control and yield. This includes some recent developments in temperature reproducibility by compensated emissivity control.

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DO - 10.1109/ICSMC.1993.384841

M3 - Conference contribution

AN - SCOPUS:0027883363

SN - 0780309111

VL - 2

SP - 1

EP - 6

BT - Proceedings of the IEEE International Conference on Systems, Man and Cybernetics

PB - Institute of Electrical and Electronics Engineers

CY - Piscataway

Y2 - 17 October 1993 through 20 October 1993

ER -

Rapid thermal processing systems: oerview of capabilities and limitations

Abstract

Conference

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