Rapid thermal processing systems: oerview of capabilities and limitations

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Abstract

This paper reviews the current status, problems and options in RTP system and process design. Some commercial systems will be discussed along with some improvements that can still be made in temperature reproducibility, process control and yield. This includes some recent developments in temperature reproducibility by compensated emissivity control.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Systems, Man and Cybernetics
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Pages1-6
Number of pages6
Volume2
ISBN (Print)0780309111
DOIs
Publication statusPublished - 1 Dec 1993
Externally publishedYes
EventSystems, Man and Cybernetics, 1993. International Conference on Systems Engineering in the Service of Human. 17 -20 Oct 1993, Le Touquet -
Duration: 17 Oct 1993 → …

Conference

ConferenceSystems, Man and Cybernetics, 1993. International Conference on Systems Engineering in the Service of Human. 17 -20 Oct 1993, Le Touquet
Period17/10/93 → …

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