Rapid Thermal and Integrated Processing VII: symposium held April 13-15, 1998, San Francisco, California, U.S.A.

Mehmet C. Ozturk (Editor), F. Roozeboom (Editor), P.J. Timans (Editor), S.H. Pas (Editor)

Research output: Book/Report › Book editing › Academic

Name	Materials Research Society symposium proceedings
Volume	525
ISSN (Print)	0272-9172

Cite this

@book{1c6f449728c042ceba6f27913df3e8a9,

title = "Rapid Thermal and Integrated Processing VII: symposium held April 13-15, 1998, San Francisco, California, U.S.A.",

editor = "Ozturk, {Mehmet C.} and F. Roozeboom and P.J. Timans and S.H. Pas",

year = "1998",

month = sep,

day = "1",

language = "English",

isbn = "9781558994317",

series = "Materials Research Society symposium proceedings",

publisher = "Materials Research Society",

address = "United States",

}

Rapid Thermal and Integrated Processing VII: symposium held April 13-15, 1998, San Francisco, California, U.S.A. / Ozturk, Mehmet C. (Editor); Roozeboom, F. (Editor); Timans, P.J. (Editor) et al.
Warrendale, PA: Materials Research Society, 1998. 403 p. (Materials Research Society symposium proceedings; Vol. 525).

Research output: Book/Report › Book editing › Academic

TY - BOOK

T1 - Rapid Thermal and Integrated Processing VII

T2 - symposium held April 13-15, 1998, San Francisco, California, U.S.A.

A2 - Ozturk, Mehmet C.

A2 - Roozeboom, F.

A2 - Timans, P.J.

A2 - Pas, S.H.

PY - 1998/9/1

Y1 - 1998/9/1

M3 - Book editing

SN - 9781558994317

T3 - Materials Research Society symposium proceedings

BT - Rapid Thermal and Integrated Processing VII

PB - Materials Research Society

CY - Warrendale, PA

ER -