Rapid Thermal and Integrated Processing VI

Jeffrey C. Gelpey (Editor), T.J. Riley (Editor), F. Roozeboom (Editor), S. Saito (Editor)

Research output: Book/ReportBook editingAcademic

Original languageEnglish
Place of PublicationPittsburgh
PublisherMaterials Research Society
Number of pages434
ISBN (Print)9781558993747
Publication statusPublished - 1 Jan 1998
Externally publishedYes

Publication series

NameMaterials Research Society symposium proceedings
Volume470
ISSN (Print)0272-9172

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