Rapid Thermal and Integrated Processing III: symposium held April 4-7, 1994, San Francisco, California, U.S.A.

S.R.J. Brueck (Editor), Jeffrey C. Gelpey (Editor), M.L. Green (Editor), F. Roozeboom (Editor), J.J. Wortman (Editor)

Research output: Book/Report › Book editing › Academic

Name	Materials Research Society symposium proceedings
Volume	342
ISSN (Print)	0272-9172

Cite this

@book{66131db8e9c2443f9492d48b9378b089,

title = "Rapid Thermal and Integrated Processing III: symposium held April 4-7, 1994, San Francisco, California, U.S.A.",

editor = "S.R.J. Brueck and Gelpey, \{Jeffrey C.\} and M.L. Green and F. Roozeboom and J.J. Wortman",

year = "1994",

month = aug,

day = "1",

language = "English",

isbn = "9781558992429",

series = "Materials Research Society symposium proceedings",

publisher = "Materials Research Society",

address = "United States",

}

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T2 - symposium held April 4-7, 1994, San Francisco, California, U.S.A.

A2 - Brueck, S.R.J.

A2 - Gelpey, Jeffrey C.

A2 - Green, M.L.

A2 - Roozeboom, F.

A2 - Wortman, J.J.

PY - 1994/8/1

Y1 - 1994/8/1

M3 - Book editing

SN - 9781558992429

T3 - Materials Research Society symposium proceedings

BT - Rapid Thermal and Integrated Processing III

PB - Materials Research Society

CY - Pittsburgh

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