Impurity diffusion in the d layer during the process of its growth has been considered. Experiments show that the spreading of the impurity profile has a complex dependence on the in-plane impurity concentration. We carried out the numerical simulation of the self-consistent diffusion problem for the impurities moving in their own random electric field and have shown that at some critical impurity concentration in d layer the impurity distribution function perpendicular to the layer acquires a non-Gaussian character.
Averkiev, N. S., Monakhov, A. M., Shik, A. Y., Koenraad, P. M., & Wolter, J. H. (2000). Random electric fields and impurity diffusion in δ layers. Physical Review B, 61(4), 3033-3036. https://doi.org/10.1103/PhysRevB.61.3033