Random electric fields and impurity diffusion in δ layers

N.S. Averkiev, A.M. Monakhov, A.Yu. Shik, P.M. Koenraad, J.H. Wolter

Research output: Contribution to journalArticleAcademicpeer-review

15 Citations (Scopus)
114 Downloads (Pure)


Impurity diffusion in the d layer during the process of its growth has been considered. Experiments show that the spreading of the impurity profile has a complex dependence on the in-plane impurity concentration. We carried out the numerical simulation of the self-consistent diffusion problem for the impurities moving in their own random electric field and have shown that at some critical impurity concentration in d layer the impurity distribution function perpendicular to the layer acquires a non-Gaussian character.
Original languageEnglish
Pages (from-to)3033-3036
JournalPhysical Review B
Issue number4
Publication statusPublished - 2000


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