Radiation generated plasmas : a challenge in modern lithography

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Kroesen, Gerrit M.W., Promotor van der Mullen, Joost, Promotor Moors, J.H.J., Copromotor
Award date	14 May 2008
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-1258-4
DOIs	https://doi.org/10.6100/IR634669
Publication status	Published - 2008

Access to Document

@phdthesis{f0e4f2b4287646788322237efeeb9325,

title = "Radiation generated plasmas : a challenge in modern lithography",

author = "\{Velden, van der\}, M.H.L.",

year = "2008",

doi = "10.6100/IR634669",

language = "English",

isbn = "978-90-386-1258-4",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}