Quantitative EPMA and TEM of unsupported films

J.M. Dijkstra, G.F. Bastin, H.J.M. Heijligers, D. Klepper

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
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Abstract

Quantitative analysis can be done very accurately with the aid of computer programs based on an accurate description of the amount of X-rays generated at each depth within the specimen. These models have achieved such performance that thin layers and even multilayers can also be analyzed. In this article the next step in the development is described: the analysis of unsupported films. This technique is very well applicable in both the electron microprobe and the transmission electron microscope, but in the latter case hardware adjustments might be necessary.
Original languageEnglish
Pages (from-to)277-284
JournalMikrochimica Acta
Volume114-115
DOIs
Publication statusPublished - 1994

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