@inproceedings{a065b5da94e141878ed0f7c56eff1dc4,
title = "Quantitative electron probe microanalysis of multilayer structures",
abstract = "A method is discussed to use the basics of quantitative electron probe microanalysis (EPMA) programs for the analysis of thin films and multi-layer structures. The program described yields good results for both simple cases like a single film on a substrate, as well as for multi-layer systems and for the determination of concentration profiles in depth.",
author = "G.F. Bastin and J.M. Dijkstra and H.J.M. Heijligers and D. Klepper",
year = "1992",
language = "English",
series = "Mikrochimica Acta, Supplement",
publisher = "EMAS",
pages = "93--97",
editor = "A. Boekestein and M.K. Pavicevic",
booktitle = "Proceedings of the EMAS'91 European Workshop, May 1991, Dubrovnik",
}