Quantitative electron probe microanalysis of multilayer structures

G.F. Bastin, J.M. Dijkstra, H.J.M. Heijligers, D. Klepper

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Abstract

A method is discussed to use the basics of quantitative electron probe microanalysis (EPMA) programs for the analysis of thin films and multi-layer structures. The program described yields good results for both simple cases like a single film on a substrate, as well as for multi-layer systems and for the determination of concentration profiles in depth.
Original languageEnglish
Title of host publicationProceedings of the EMAS'91 European Workshop, May 1991, Dubrovnik
EditorsA. Boekestein, M.K. Pavicevic
Place of PublicationAntwerpen
PublisherEMAS
Pages93-97
Publication statusPublished - 1992

Publication series

NameMikrochimica Acta, Supplement
Volume12
ISSN (Print)0076-8642

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electron probes
microanalysis
laminates
thin films
profiles

Cite this

Bastin, G. F., Dijkstra, J. M., Heijligers, H. J. M., & Klepper, D. (1992). Quantitative electron probe microanalysis of multilayer structures. In A. Boekestein, & M. K. Pavicevic (Eds.), Proceedings of the EMAS'91 European Workshop, May 1991, Dubrovnik (pp. 93-97). (Mikrochimica Acta, Supplement; Vol. 12). Antwerpen: EMAS.
Bastin, G.F. ; Dijkstra, J.M. ; Heijligers, H.J.M. ; Klepper, D. / Quantitative electron probe microanalysis of multilayer structures. Proceedings of the EMAS'91 European Workshop, May 1991, Dubrovnik. editor / A. Boekestein ; M.K. Pavicevic. Antwerpen : EMAS, 1992. pp. 93-97 (Mikrochimica Acta, Supplement).
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abstract = "A method is discussed to use the basics of quantitative electron probe microanalysis (EPMA) programs for the analysis of thin films and multi-layer structures. The program described yields good results for both simple cases like a single film on a substrate, as well as for multi-layer systems and for the determination of concentration profiles in depth.",
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Bastin, GF, Dijkstra, JM, Heijligers, HJM & Klepper, D 1992, Quantitative electron probe microanalysis of multilayer structures. in A Boekestein & MK Pavicevic (eds), Proceedings of the EMAS'91 European Workshop, May 1991, Dubrovnik. Mikrochimica Acta, Supplement, vol. 12, EMAS, Antwerpen, pp. 93-97.

Quantitative electron probe microanalysis of multilayer structures. / Bastin, G.F.; Dijkstra, J.M.; Heijligers, H.J.M.; Klepper, D.

Proceedings of the EMAS'91 European Workshop, May 1991, Dubrovnik. ed. / A. Boekestein; M.K. Pavicevic. Antwerpen : EMAS, 1992. p. 93-97 (Mikrochimica Acta, Supplement; Vol. 12).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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N2 - A method is discussed to use the basics of quantitative electron probe microanalysis (EPMA) programs for the analysis of thin films and multi-layer structures. The program described yields good results for both simple cases like a single film on a substrate, as well as for multi-layer systems and for the determination of concentration profiles in depth.

AB - A method is discussed to use the basics of quantitative electron probe microanalysis (EPMA) programs for the analysis of thin films and multi-layer structures. The program described yields good results for both simple cases like a single film on a substrate, as well as for multi-layer systems and for the determination of concentration profiles in depth.

M3 - Conference contribution

T3 - Mikrochimica Acta, Supplement

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BT - Proceedings of the EMAS'91 European Workshop, May 1991, Dubrovnik

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Bastin GF, Dijkstra JM, Heijligers HJM, Klepper D. Quantitative electron probe microanalysis of multilayer structures. In Boekestein A, Pavicevic MK, editors, Proceedings of the EMAS'91 European Workshop, May 1991, Dubrovnik. Antwerpen: EMAS. 1992. p. 93-97. (Mikrochimica Acta, Supplement).