Quantitative electron probe microanalysis of multilayer structures

G.F. Bastin, J.M. Dijkstra, H.J.M. Heijligers, D. Klepper

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A method is discussed to use the basics of quantitative electron probe microanalysis (EPMA) programs for the analysis of thin films and multi-layer structures. The program described yields good results for both simple cases like a single film on a substrate, as well as for multi-layer systems and for the determination of concentration profiles in depth.
Original languageEnglish
Title of host publicationProceedings of the EMAS'91 European Workshop, May 1991, Dubrovnik
EditorsA. Boekestein, M.K. Pavicevic
Place of PublicationAntwerpen
Publication statusPublished - 1992

Publication series

NameMikrochimica Acta, Supplement
ISSN (Print)0076-8642


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