A method is discussed to use the basics of quantitative electron probe microanalysis (EPMA) programs for the analysis of thin films and multi-layer structures. The program described yields good results for both simple cases like a single film on a substrate, as well as for multi-layer systems and for the determination of concentration profiles in depth.
|Title of host publication||Proceedings of the EMAS'91 European Workshop, May 1991, Dubrovnik|
|Editors||A. Boekestein, M.K. Pavicevic|
|Place of Publication||Antwerpen|
|Publication status||Published - 1992|
|Name||Mikrochimica Acta, Supplement|