Quantitative analysis of the interfacial reaction and the interfacial thickness by Fourier Transform Infrared Spectroscopy (FTIR) and Variable Angle Spectroscopic Ellipsometry (VASE)

M. Prusty; Juan Li; J.G.P. Goossens; M. Duin, van; G. Wit, de; P.J. Lemstra

Quantitative analysis of the interfacial reaction and the interfacial thickness by Fourier Transform Infrared Spectroscopy (FTIR) and Variable Angle Spectroscopic Ellipsometry (VASE)

M. Prusty
, Juan Li
, J.G.P. Goossens
, M. Duin, van
, G. Wit, de
, P.J. Lemstra

Chemical Engineering and Chemistry

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Abstracts of Papers, 231st ACS National Meeting, Atlanta, GA, United States, March 26-30, 2006
Place of Publication	Washington, D. C
Publisher	American Chemical Society
Pages	PHYS-058
Publication status	Published - 2006

Cite this

Prusty, M., Li, J., Goossens, J. G. P., Duin, van, M., Wit, de, G., & Lemstra, P. J. (2006). Quantitative analysis of the interfacial reaction and the interfacial thickness by Fourier Transform Infrared Spectroscopy (FTIR) and Variable Angle Spectroscopic Ellipsometry (VASE). In Abstracts of Papers, 231st ACS National Meeting, Atlanta, GA, United States, March 26-30, 2006 (pp. PHYS-058). American Chemical Society.

Prusty, M. ; Li, Juan ; Goossens, J.G.P. et al. / Quantitative analysis of the interfacial reaction and the interfacial thickness by Fourier Transform Infrared Spectroscopy (FTIR) and Variable Angle Spectroscopic Ellipsometry (VASE). Abstracts of Papers, 231st ACS National Meeting, Atlanta, GA, United States, March 26-30, 2006. Washington, D. C : American Chemical Society, 2006. pp. PHYS-058

@inproceedings{7e00950877db49cab6b4e998b6d03988,

title = "Quantitative analysis of the interfacial reaction and the interfacial thickness by Fourier Transform Infrared Spectroscopy (FTIR) and Variable Angle Spectroscopic Ellipsometry (VASE)",

author = "M. Prusty and Juan Li and J.G.P. Goossens and \{Duin, van\}, M. and \{Wit, de\}, G. and P.J. Lemstra",

year = "2006",

language = "English",

pages = "PHYS--058",

booktitle = "Abstracts of Papers, 231st ACS National Meeting, Atlanta, GA, United States, March 26-30, 2006",

publisher = "American Chemical Society",

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Prusty, M, Li, J, Goossens, JGP, Duin, van, M, Wit, de, G & Lemstra, PJ 2006, Quantitative analysis of the interfacial reaction and the interfacial thickness by Fourier Transform Infrared Spectroscopy (FTIR) and Variable Angle Spectroscopic Ellipsometry (VASE). in Abstracts of Papers, 231st ACS National Meeting, Atlanta, GA, United States, March 26-30, 2006. American Chemical Society, Washington, D. C, pp. PHYS-058.

Quantitative analysis of the interfacial reaction and the interfacial thickness by Fourier Transform Infrared Spectroscopy (FTIR) and Variable Angle Spectroscopic Ellipsometry (VASE). / Prusty, M.; Li, Juan; Goossens, J.G.P. et al.
Abstracts of Papers, 231st ACS National Meeting, Atlanta, GA, United States, March 26-30, 2006. Washington, D. C: American Chemical Society, 2006. p. PHYS-058.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Quantitative analysis of the interfacial reaction and the interfacial thickness by Fourier Transform Infrared Spectroscopy (FTIR) and Variable Angle Spectroscopic Ellipsometry (VASE)

AU - Prusty, M.

AU - Li, Juan

AU - Goossens, J.G.P.

AU - Duin, van, M.

AU - Wit, de, G.

AU - Lemstra, P.J.

PY - 2006

Y1 - 2006

M3 - Conference contribution

SP - PHYS-058

BT - Abstracts of Papers, 231st ACS National Meeting, Atlanta, GA, United States, March 26-30, 2006

PB - American Chemical Society

CY - Washington, D. C

ER -

Prusty M, Li J, Goossens JGP, Duin, van M, Wit, de G, Lemstra PJ. Quantitative analysis of the interfacial reaction and the interfacial thickness by Fourier Transform Infrared Spectroscopy (FTIR) and Variable Angle Spectroscopic Ellipsometry (VASE). In Abstracts of Papers, 231st ACS National Meeting, Atlanta, GA, United States, March 26-30, 2006. Washington, D. C: American Chemical Society. 2006. p. PHYS-058