Quantification of the surface composition of low-work function surfaces using low-energy ion scattering

Quantification of the surface composition of low-work function systems using low-energy noble gas ion scattering is strongly influenced by resonant neutralization. Below a certain threshold in the work function, resonant neutralization to the first excited level of the ion is possible and the neutralization probability of the ions increases exponentially with decreasing work function. We show how to correct for the influence of the work function and perform the quantification using the characteristic velocity method. The discussion and conclusions here are relevant for all ion scattering studies using low-energy noble gas ions on surfaces with a work function below 4 eV.