Abstract
Original language | English |
---|---|
Pages (from-to) | 2308-2313 |
Number of pages | 6 |
Journal | Journal of Vacuum Science and Technology A |
Volume | 12 |
Issue number | 4 |
Publication status | Published - 1994 |
J. Jacobs, S. Reijne, R.J.M. Elfrink, S.N. Mikhailov, Hidde Brongersma, Matthias Wuttig
Research output: Contribution to journal › Article › Academic › peer-review
Original language | English |
---|---|
Pages (from-to) | 2308-2313 |
Number of pages | 6 |
Journal | Journal of Vacuum Science and Technology A |
Volume | 12 |
Issue number | 4 |
Publication status | Published - 1994 |