Pulsed power source for in-situ plasma cleaning application

Research output: Thesis › EngD Thesis

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Original language	English
Supervisors/Advisors	Huiskamp, Tom, Supervisor Blom, Paul P.M., Supervisor
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Publication status	Published - 1 Nov 2022

EngD thesis. - Confidential until 1-11-2026

Access to Document

@phdthesis{f331868f6de6454a8baefea5330e2bc9,

title = "Pulsed power source for in-situ plasma cleaning application",

author = "\{Garcia Rochin\}, Roberto",

note = "EngD thesis. - Confidential until 1-11-2026",

year = "2022",

month = nov,

day = "1",

language = "English",

series = "EngD Thesis",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}