Property control of transparent conducting oxides

J.L. Linden, A.M.B. Mol, van, C.P.G. Schrauwen, R. Groenen, M.C.M. Sanden, van de, A.D. Kuypers

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publicationProceedings 46th Annual SVC Technical Conference
Place of PublicationSan Francisco
Publication statusPublished - 2003

Publication series

NameAnnual Technical Conference Proceedings - Society of Vacuum Coaters
ISSN (Print)0731-1699

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