Property control of transparent conducting oxides

J.L. Linden, A.M.B. Mol, van, C.P.G. Schrauwen, R. Groenen, M.C.M. Sanden, van de, A.D. Kuypers

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publicationProceedings 46th Annual SVC Technical Conference
Place of PublicationSan Francisco
Pages576-579
Publication statusPublished - 2003

Publication series

NameAnnual Technical Conference Proceedings - Society of Vacuum Coaters
Volume46th
ISSN (Print)0731-1699

Cite this

Linden, J. L., Mol, van, A. M. B., Schrauwen, C. P. G., Groenen, R., Sanden, van de, M. C. M., & Kuypers, A. D. (2003). Property control of transparent conducting oxides. In Proceedings 46th Annual SVC Technical Conference (pp. 576-579). (Annual Technical Conference Proceedings - Society of Vacuum Coaters; Vol. 46th)..