Promotion of Plasma-Induced Deuterium Uptake in Ruthenium Films by Monolayer-Thick Tin Layers

S.C. Wang (Corresponding author), M. van Kampen, T.W. Morgan

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Abstract

Surface impurities can have a significant influence on hydrogen uptake of materials. Examples such as the hydrogen spillover effect demonstrate that even very small surface impurity quantities can lead to order-of-magnitude changes in the total amount of hydrogen taken up by a material. In this work, we report the first experimental demonstration of promoted deuterium uptake in Ru thin films by Sn. Deuterium plasma exposures were carried out for Ru-capped targets covered by Sn up to a few atoms in thickness. After the exposure, the residual Sn content and the deuterium retention were measured to quantify the Sn etching and the deuterium uptake, respectively. By increasing the amount of Sn from zero to one atomic layer on Ru, we found after the exposure that the Sn content stays unchanged while the deuterium uptake rate severely increases with the Sn content by 2-3 orders of magnitude. These results can be understood by simulations using a reaction-diffusion model with multiple surface species and the lateral surface migration of deuterium. By contrast, as the as-deposited Sn content goes above one atomic layer, Sn removal takes place, and the deuterium uptake rate decreases with the as-deposited Sn content. Possible explanations are proposed by considering the interplay between Sn etching and deuterium uptake. In all, this work provides insights into interactions between multiple surface species in relation to plasma-induced hydrogen uptake. By further development, this could eventually lead to a potential mitigation method to circumvent the promoted hydrogen uptake in Ru-capped films.

Original languageEnglish
Pages (from-to)57769–57782
Number of pages14
JournalACS Applied Materials and Interfaces
Volume15
Issue number49
DOIs
Publication statusPublished - 13 Dec 2023

Funding

This research was carried out under project number T16010b in the framework of the Research Program of the Materials innovation institute (M2i) ( https://www.m2i.nl ) supported by the Dutch government. This work has been carried out within the framework of the EUROfusion Consortium, funded by the European Union via the Euratom Research and Training Programme (Grant Agreement No 101052200 - EUROfusion). Views and opinions expressed are however those of the author(s) only and do not necessarily reflect those of the European Union or the European Commission. Neither the European Union nor the European Commission can be held responsible for them. The authors would like to acknowledge ASML for their financial and technical support. We would like to thank Michel Riepen and Marise Gielen at ASML for the experiments on Diablo. We appreciate great help from Richard Al and Peter Wortman at DIFFER for designing and manufacturing components of nano-PSI. We also thank Wim Arnold Bik at DIFFER for fruitful discussion.

FundersFunder number
European Commission101052200 - EUROfusion
Materials Innovation Institute (M2i)

    Keywords

    • deuterium retention
    • extreme ultraviolet lithography
    • hydrogen uptake
    • plasma
    • reaction-diffusion model
    • ruthenium
    • surface coverage
    • tin

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