Progress on carbon nanotube BEOL interconnects

  • B. Uhlig
  • , J. Liang
  • , J. Lee
  • , Raphael Ramos
  • , A. Dhavamani
  • , N. Nagy
  • , J. Dijon
  • , H. Okuno
  • , D. Kalita
  • , Vihar P. Georgiev
  • , A. Asenov
  • , Salvatore M. Amoroso
  • , Liping Wang
  • , Campbell Millar
  • , F. Konemann
  • , Bernd Gotsmann
  • , G. Goncalves
  • , B. Chen
  • , R. R. Pandey
  • , R. Chen
    • Aida Todri-Sanial

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

14 Citations (Scopus)

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