Progress on carbon nanotube BEOL interconnects

B. Uhlig; J. Liang; J. Lee; Raphael Ramos; A. Dhavamani; N. Nagy; J. Dijon; H. Okuno; D. Kalita; Vihar P. Georgiev; A. Asenov; Salvatore M. Amoroso; Liping Wang; Campbell Millar; F. Konemann; Bernd Gotsmann; G. Goncalves; B. Chen; R. R. Pandey; R. Chen; Aida Todri-Sanial

doi:10.23919/DATE.2018.8342144

Progress on carbon nanotube BEOL interconnects

B. Uhlig
, J. Liang
, J. Lee
, Raphael Ramos
, A. Dhavamani
, N. Nagy
, J. Dijon
, H. Okuno
, D. Kalita
, Vihar P. Georgiev
, A. Asenov
, Salvatore M. Amoroso
, Liping Wang
, Campbell Millar
, F. Konemann
, Bernd Gotsmann
, G. Goncalves
, B. Chen
, R. R. Pandey
, R. Chen

Aida Todri-Sanial

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

13 Citations (Scopus)

Abstract

This article is a review of the current progress and results obtained in the European H2020 CONNECT project. Amongst all the research on carbon nanotube interconnects, those discussed here cover 1) process & growth of carbon nanotube interconnects compatible with back-end-of-line integration, 2) modeling and simulation from atomistic to circuit-level bench-marking and performance prediction, and 3) characterization and electrical measurements. We provide an overview of the current advancements on carbon nanotube interconnects and also regarding the prospects for designing energy efficient integrated circuits. Each selected category is presented in an accessible manner aiming to serve as a review and informative cornerstone on carbon nanotube interconnects.

Original language	English
Title of host publication	2018 Design, Automation & Test in Europe Conference & Exhibition (DATE)
Publisher	Institute of Electrical and Electronics Engineers
Pages	937-942
Number of pages	6
ISBN (Electronic)	978-3-9819263-0-9
DOIs	https://doi.org/10.23919/DATE.2018.8342144
Publication status	Published - 2018
Externally published	Yes
Event	21st Design, Automation and Test in Europe Conference and Exhibition, DATE 2018 - Dresden, Germany Duration: 19 Mar 2018 → 23 Mar 2018 Conference number: 21 https://www.date-conference.com/date18/

Conference

Conference	21st Design, Automation and Test in Europe Conference and Exhibition, DATE 2018
Abbreviated title	DATE 2018
Country/Territory	Germany
City	Dresden
Period	19/03/18 → 23/03/18
Internet address	https://www.date-conference.com/date18/

Access to Document

10.23919/DATE.2018.8342144

Cite this

Uhlig, B., Liang, J., Lee, J., Ramos, R., Dhavamani, A., Nagy, N., Dijon, J., Okuno, H., Kalita, D., Georgiev, V. P., Asenov, A., Amoroso, S. M., Wang, L., Millar, C., Konemann, F., Gotsmann, B., Goncalves, G., Chen, B., Pandey, R. R., ... Todri-Sanial, A. (2018). Progress on carbon nanotube BEOL interconnects. In 2018 Design, Automation & Test in Europe Conference & Exhibition (DATE) (pp. 937-942). Institute of Electrical and Electronics Engineers. https://doi.org/10.23919/DATE.2018.8342144

@inproceedings{9b48014076df462ca83b24e36363c5e4,

title = "Progress on carbon nanotube BEOL interconnects",

abstract = "This article is a review of the current progress and results obtained in the European H2020 CONNECT project. Amongst all the research on carbon nanotube interconnects, those discussed here cover 1) process \& growth of carbon nanotube interconnects compatible with back-end-of-line integration, 2) modeling and simulation from atomistic to circuit-level bench-marking and performance prediction, and 3) characterization and electrical measurements. We provide an overview of the current advancements on carbon nanotube interconnects and also regarding the prospects for designing energy efficient integrated circuits. Each selected category is presented in an accessible manner aiming to serve as a review and informative cornerstone on carbon nanotube interconnects.",

author = "B. Uhlig and J. Liang and J. Lee and Raphael Ramos and A. Dhavamani and N. Nagy and J. Dijon and H. Okuno and D. Kalita and Georgiev, \{Vihar P.\} and A. Asenov and Amoroso, \{Salvatore M.\} and Liping Wang and Campbell Millar and F. Konemann and Bernd Gotsmann and G. Goncalves and B. Chen and Pandey, \{R. R.\} and R. Chen and Aida Todri-Sanial",

year = "2018",

doi = "10.23919/DATE.2018.8342144",

language = "English",

pages = "937--942",

booktitle = "2018 Design, Automation \& Test in Europe Conference \& Exhibition (DATE)",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "21st Design, Automation and Test in Europe Conference and Exhibition, DATE 2018, DATE 2018 ; Conference date: 19-03-2018 Through 23-03-2018",

url = "https://www.date-conference.com/date18/",

}

Uhlig, B, Liang, J, Lee, J, Ramos, R, Dhavamani, A, Nagy, N, Dijon, J, Okuno, H, Kalita, D, Georgiev, VP, Asenov, A, Amoroso, SM, Wang, L, Millar, C, Konemann, F, Gotsmann, B, Goncalves, G, Chen, B, Pandey, RR, Chen, R & Todri-Sanial, A 2018, Progress on carbon nanotube BEOL interconnects. in 2018 Design, Automation & Test in Europe Conference & Exhibition (DATE). Institute of Electrical and Electronics Engineers, pp. 937-942, 21st Design, Automation and Test in Europe Conference and Exhibition, DATE 2018, Dresden, Germany, 19/03/18. https://doi.org/10.23919/DATE.2018.8342144

TY - GEN

T1 - Progress on carbon nanotube BEOL interconnects

AU - Uhlig, B.

AU - Liang, J.

AU - Lee, J.

AU - Ramos, Raphael

AU - Dhavamani, A.

AU - Nagy, N.

AU - Dijon, J.

AU - Okuno, H.

AU - Kalita, D.

AU - Georgiev, Vihar P.

AU - Asenov, A.

AU - Amoroso, Salvatore M.

AU - Wang, Liping

AU - Millar, Campbell

AU - Konemann, F.

AU - Gotsmann, Bernd

AU - Goncalves, G.

AU - Chen, B.

AU - Pandey, R. R.

AU - Chen, R.

AU - Todri-Sanial, Aida

N1 - Conference code: 21

PY - 2018

Y1 - 2018

N2 - This article is a review of the current progress and results obtained in the European H2020 CONNECT project. Amongst all the research on carbon nanotube interconnects, those discussed here cover 1) process & growth of carbon nanotube interconnects compatible with back-end-of-line integration, 2) modeling and simulation from atomistic to circuit-level bench-marking and performance prediction, and 3) characterization and electrical measurements. We provide an overview of the current advancements on carbon nanotube interconnects and also regarding the prospects for designing energy efficient integrated circuits. Each selected category is presented in an accessible manner aiming to serve as a review and informative cornerstone on carbon nanotube interconnects.

AB - This article is a review of the current progress and results obtained in the European H2020 CONNECT project. Amongst all the research on carbon nanotube interconnects, those discussed here cover 1) process & growth of carbon nanotube interconnects compatible with back-end-of-line integration, 2) modeling and simulation from atomistic to circuit-level bench-marking and performance prediction, and 3) characterization and electrical measurements. We provide an overview of the current advancements on carbon nanotube interconnects and also regarding the prospects for designing energy efficient integrated circuits. Each selected category is presented in an accessible manner aiming to serve as a review and informative cornerstone on carbon nanotube interconnects.

U2 - 10.23919/DATE.2018.8342144

DO - 10.23919/DATE.2018.8342144

M3 - Conference contribution

SP - 937

EP - 942

BT - 2018 Design, Automation & Test in Europe Conference & Exhibition (DATE)

PB - Institute of Electrical and Electronics Engineers

T2 - 21st Design, Automation and Test in Europe Conference and Exhibition, DATE 2018

Y2 - 19 March 2018 through 23 March 2018

ER -

Progress on carbon nanotube BEOL interconnects

Abstract

Conference

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