Progress in reactive ion etching of epitaxial GaN

F. Karouta; P. Vreugdewater; B. Jacobs; B.H. Roy, van; O. Schön; H. Protzmann; M. Heuken

Progress in reactive ion etching of epitaxial GaN

F. Karouta, P. Vreugdewater, B. Jacobs, B.H. Roy, van, O. Schön, H. Protzmann, M. Heuken

Photonic Integration

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proc. Conference on Optoelectronics and Microelectronics Materials and Devices (COMMAD)
Pages	171-174
Publication status	Published - 1999
Event	1999 Conference on Optoelectronics and Microelectronic Materials and Devices (COMMAD 1999) - Perth, Australia Duration: 14 Dec 1999 → 16 Dec 1999

Conference

Conference	1999 Conference on Optoelectronics and Microelectronic Materials and Devices (COMMAD 1999)
Country/Territory	Australia
City	Perth
Period	14/12/99 → 16/12/99

Cite this

@inproceedings{bf1816131741437ca4c7b0b7263f9974,

title = "Progress in reactive ion etching of epitaxial GaN",

author = "F. Karouta and P. Vreugdewater and B. Jacobs and {Roy, van}, B.H. and O. Sch{\"o}n and H. Protzmann and M. Heuken",

year = "1999",

language = "English",

isbn = "0-7803-4513-4",

pages = "171--174",

booktitle = "Proc. Conference on Optoelectronics and Microelectronics Materials and Devices (COMMAD)",

note = "1999 Conference on Optoelectronics and Microelectronic Materials and Devices (COMMAD 1999) ; Conference date: 14-12-1999 Through 16-12-1999",

}

Karouta, F, Vreugdewater, P, Jacobs, B, Roy, van, BH, Schön, O, Protzmann, H & Heuken, M 1999, Progress in reactive ion etching of epitaxial GaN. in Proc. Conference on Optoelectronics and Microelectronics Materials and Devices (COMMAD). pp. 171-174, 1999 Conference on Optoelectronics and Microelectronic Materials and Devices (COMMAD 1999), Perth, Australia, 14/12/99.

TY - GEN

T1 - Progress in reactive ion etching of epitaxial GaN

AU - Karouta, F.

AU - Vreugdewater, P.

AU - Jacobs, B.

AU - Roy, van, B.H.

AU - Schön, O.

AU - Protzmann, H.

AU - Heuken, M.

PY - 1999

Y1 - 1999

M3 - Conference contribution

SN - 0-7803-4513-4

SP - 171

EP - 174

BT - Proc. Conference on Optoelectronics and Microelectronics Materials and Devices (COMMAD)

T2 - 1999 Conference on Optoelectronics and Microelectronic Materials and Devices (COMMAD 1999)

Y2 - 14 December 1999 through 16 December 1999

ER -