Progress in reactive ion etching of epitaxial GaN

F. Karouta, P. Vreugdewater, B. Jacobs, B.H. Roy, van, O. Schön, H. Protzmann, M. Heuken

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProc. Conference on Optoelectronics and Microelectronics Materials and Devices (COMMAD)
Pages171-174
Publication statusPublished - 1999
Event1999 Conference on Optoelectronics and Microelectronic Materials and Devices (COMMAD 1999) - Perth, Australia
Duration: 14 Dec 199916 Dec 1999

Conference

Conference1999 Conference on Optoelectronics and Microelectronic Materials and Devices (COMMAD 1999)
CountryAustralia
CityPerth
Period14/12/9916/12/99

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