Progress in reactive ion etching of epitaxial GaN

F. Karouta, P. Vreugdewater, B. Jacobs, B.H. Roy, van, O. Schön, H. Protzmann, M. Heuken

Research output: Non-textual formSoftwareProfessional

Original languageEnglish
PublisherTechnische Universiteit Eindhoven
Publication statusPublished - 1998

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