@conference{af21de1ee22246c9a93635e46d449607,
title = "Process drifts during deposition of microcrystalline silicon solar cells : plasma-induced substrate heating and SiH4 back diffusion",
author = "\{van den Donker\}, M.N. and W.M.M. Kessels",
note = "18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts; 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands ; Conference date: 22-03-2006 Through 23-03-2006",
year = "2006",
language = "English",
pages = "O 12--",
}