Process drifts during deposition of microcrystalline silicon solar cells : plasma-induced substrate heating and SiH4 back diffusion

M.N. van den Donker; W.M.M. Kessels

Process drifts during deposition of microcrystalline silicon solar cells : plasma-induced substrate heating and SiH4 back diffusion

M.N. van den Donker, W.M.M. Kessels

Research output: Contribution to conference › Poster

Abstract

No abstract

Original language	English
Pages	O 12-
Publication status	Published - 2006
Event	18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands - Lunteren, Netherlands Duration: 22 Mar 2006 → 23 Mar 2006

Conference

Conference	18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands
Country/Territory	Netherlands
City	Lunteren
Period	22/03/06 → 23/03/06

Bibliographical note

18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts

Cite this

@conference{af21de1ee22246c9a93635e46d449607,

title = "Process drifts during deposition of microcrystalline silicon solar cells : plasma-induced substrate heating and SiH4 back diffusion",

abstract = "No abstract",

author = "{van den Donker}, M.N. and W.M.M. Kessels",

note = "18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts; 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands ; Conference date: 22-03-2006 Through 23-03-2006",

year = "2006",

language = "English",

pages = "O 12--",

}

Process drifts during deposition of microcrystalline silicon solar cells : plasma-induced substrate heating and SiH4 back diffusion. / van den Donker, M.N.; Kessels, W.M.M.
2006. O 12- Poster session presented at 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands, Lunteren, Netherlands.

Research output: Contribution to conference › Poster

TY - CONF

T1 - Process drifts during deposition of microcrystalline silicon solar cells : plasma-induced substrate heating and SiH4 back diffusion

AU - van den Donker, M.N.

AU - Kessels, W.M.M.

N1 - 18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts

PY - 2006

Y1 - 2006

N2 - No abstract

AB - No abstract

M3 - Poster

SP - O 12-

T2 - 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands

Y2 - 22 March 2006 through 23 March 2006

ER -

Process drifts during deposition of microcrystalline silicon solar cells : plasma-induced substrate heating and SiH4 back diffusion

Abstract

Conference

Bibliographical note

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Cite this