Process drifts during deposition of microcrystalline silicon solar cells : plasma-induced substrate heating and SiH4 back diffusion

M.N. van den Donker, W.M.M. Kessels

Research output: Contribution to conferencePoster

Abstract

No abstract
Original languageEnglish
PagesO 12-
Publication statusPublished - 2006
Event18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands - Lunteren, Netherlands
Duration: 22 Mar 200623 Mar 2006

Conference

Conference18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands
CountryNetherlands
CityLunteren
Period22/03/0623/03/06

Bibliographical note

18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts

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