Process dependency of level sensor : design of tools to investigate height process dependency in ASML PAS5500 and Twinscan Level Sensors

R.J.J.G.A.M. Smeets; Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Design and Technology of Instrumentation (DTI)

Process dependency of level sensor : design of tools to investigate height process dependency in ASML PAS5500 and Twinscan Level Sensors

R.J.J.G.A.M. Smeets, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Design and Technology of Instrumentation (DTI)

Applied Physics and Science Education

Research output: Thesis › EngD Thesis

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution
Supervisors/Advisors	Beijerinck, Herman, Supervisor van Asten, N.A.A.J., External supervisor
Award date	1 Jan 2001
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	90-444-0169-6
Publication status	Published - 2001

Bibliographical note

Eindverslag

Cite this

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title = "Process dependency of level sensor : design of tools to investigate height process dependency in ASML PAS5500 and Twinscan Level Sensors",

author = "R.J.J.G.A.M. Smeets and {Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Design and Technology of Instrumentation (DTI)}",

note = "Eindverslag",

year = "2001",

language = "English",

isbn = "90-444-0169-6",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

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AU - Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Design and Technology of Instrumentation (DTI)

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M3 - EngD Thesis

SN - 90-444-0169-6

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