Abstract
Strong deviations from Maxwellian equilibrium of the electron energy distribution function
(EEDF) are very often encountered in (relatively) high pressure, non-equilibrium plasmas. The
shape of the EEDF will strong affect all electron induced excitation processes and consequently
excited species net effluxes. In this contribution, we will present an experimental investigation of
the EEDF of an intermediate pressure (argon) microwave plasma by a combination of experimental
and modelling techniques.
| Original language | English |
|---|---|
| Pages | 1-3 |
| Publication status | Published - 2013 |