Pressure drop of laminar gas flows in a microchannel containing various pillar matrices

S. Vanapalli, H.J.M. Brake, ter, H.V. Jansen, J.F. Burger, H.J. Holland, T.T. Veenstra, M.C. Elwenspoek

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    The pressure drop of gas flows in a microchannel filled with a dense pillar matrix was investigated with specific attention to a pillar shape. Pillars of height 250 micro m and aspect ratio of about 10 were etched in silicon using an optimized Bosch deep reactive ion etching process. The pressure drop head-loss coeff. due to compression and expansion of gas at the inlet and outlet of the pillar matrix was estd. to be about 1.4 for an opening ratio of 10. A comparison of friction factor correlations for circular pillar cross-sections agreed rather well with the correlations proposed for the macroscale. Exptl. detd. friction factor correlations for several pillar cross-sections for Reynolds nos. in the range of 50-500 are presented. Among the various pillar cross-sections considered, sine-shaped pillars have the lowest friction factor. These pillar structures with low pressure drop but a rather large wetted area can be used quite effectively as regenerative materials enabling the development of micro-cryocoolers. [on SciFinder (R)]
    Original languageEnglish
    Pages (from-to)1381-1386
    JournalJournal of Micromechanics and Microengineering
    Issue number7
    Publication statusPublished - 2007


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