Preferential sputtering of B studied by low-energy ion scattering using the dual-isotope surface composition (DISC) method

P. A.J. Ackermans; M. A.P. Creuwels; H. H. Brongersma; P. J. Scanlon

doi:10.1016/S0039-6028(05)80024-X

Preferential sputtering of B studied by low-energy ion scattering using the dual-isotope surface composition (DISC) method

P. A.J. Ackermans, M. A.P. Creuwels, H. H. Brongersma, P. J. Scanlon

Applied Physics and Science Education

Research output: Contribution to journal › Article › Academic › peer-review

13 Citations (Scopus)

Abstract

Low-Energy Ion Scattering (LEIS) is a well known technique for obtaining information about the outermost layer of a surface. The Dual-Isotope Surface Composition (DISC) method for quantification of atomic compositions, which does not require the use of calibration samples, is presented in this article. This method is used to study the preferential sputtering of a natural boron sample (20% ¹⁰B and 80% ¹¹B). Using 3.5 keV ⁴He⁺ ions the surface concentration of ¹⁰B is found to be (16 ± 2)%.

Original language	English
Pages (from-to)	361-368
Number of pages	8
Journal	Surface Science
Volume	227
Issue number	3
DOIs	https://doi.org/10.1016/S0039-6028(05)80024-X
Publication status	Published - 2 Mar 1990

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title = "Preferential sputtering of B studied by low-energy ion scattering using the dual-isotope surface composition (DISC) method",

abstract = "Low-Energy Ion Scattering (LEIS) is a well known technique for obtaining information about the outermost layer of a surface. The Dual-Isotope Surface Composition (DISC) method for quantification of atomic compositions, which does not require the use of calibration samples, is presented in this article. This method is used to study the preferential sputtering of a natural boron sample (20% 10B and 80% 11B). Using 3.5 keV 4He+ ions the surface concentration of 10B is found to be (16 ± 2)%.",

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T1 - Preferential sputtering of B studied by low-energy ion scattering using the dual-isotope surface composition (DISC) method

AU - Ackermans, P. A.J.

AU - Creuwels, M. A.P.

AU - Brongersma, H. H.

AU - Scanlon, P. J.

PY - 1990/3/2

Y1 - 1990/3/2

N2 - Low-Energy Ion Scattering (LEIS) is a well known technique for obtaining information about the outermost layer of a surface. The Dual-Isotope Surface Composition (DISC) method for quantification of atomic compositions, which does not require the use of calibration samples, is presented in this article. This method is used to study the preferential sputtering of a natural boron sample (20% 10B and 80% 11B). Using 3.5 keV 4He+ ions the surface concentration of 10B is found to be (16 ± 2)%.

AB - Low-Energy Ion Scattering (LEIS) is a well known technique for obtaining information about the outermost layer of a surface. The Dual-Isotope Surface Composition (DISC) method for quantification of atomic compositions, which does not require the use of calibration samples, is presented in this article. This method is used to study the preferential sputtering of a natural boron sample (20% 10B and 80% 11B). Using 3.5 keV 4He+ ions the surface concentration of 10B is found to be (16 ± 2)%.

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U2 - 10.1016/S0039-6028(05)80024-X

DO - 10.1016/S0039-6028(05)80024-X

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SP - 361

EP - 368

JO - Surface Science

JF - Surface Science

IS - 3

ER -

Preferential sputtering of B studied by low-energy ion scattering using the dual-isotope surface composition (DISC) method

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