Preferential sputtering and oxidation of Nb-Ta single crystals studied by low-energie ion scattering

V.N. Semenov; V.G. Glebovsky; H.H. Brongersma

doi:10.1016/0042-207X(96)00132-7

Preferential sputtering and oxidation of Nb-Ta single crystals studied by low-energie ion scattering

V.N. Semenov, V.G. Glebovsky, H.H. Brongersma

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

To study preferential sputtering and oxidation, three monocrystalline NbxTa1 - x(110) alloys (x = 0.25, 0.5, 0.75) as well as pure single crystals of Nb and Ta have been prepared by electron beam floating zone melting (EBFZM) and investigated by low-energy ion scattering (LEIS). After sputter cleaning, LEIS showed the enrichment of tantalum at the surface of all alloys. After exposure to oxygen, linear relationships between the oxygen and both the niobium and tantalum signals demonstrate that matrix effects do not influence the LEIS signals for these systems. The oxygen coverages of the different alloys have been determined by calibration against the Ni(100)-O c(2 × 2) surface.

Original language	English
Pages (from-to)	1193-1196
Number of pages	4
Journal	Vacuum
Volume	47
Issue number	10
DOIs	https://doi.org/10.1016/0042-207X(96)00132-7
Publication status	Published - 1996

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@article{59661f1525b14ced844817870c3ebd39,

title = "Preferential sputtering and oxidation of Nb-Ta single crystals studied by low-energie ion scattering",

abstract = "To study preferential sputtering and oxidation, three monocrystalline NbxTa1 - x(110) alloys (x = 0.25, 0.5, 0.75) as well as pure single crystals of Nb and Ta have been prepared by electron beam floating zone melting (EBFZM) and investigated by low-energy ion scattering (LEIS). After sputter cleaning, LEIS showed the enrichment of tantalum at the surface of all alloys. After exposure to oxygen, linear relationships between the oxygen and both the niobium and tantalum signals demonstrate that matrix effects do not influence the LEIS signals for these systems. The oxygen coverages of the different alloys have been determined by calibration against the Ni(100)-O c(2 × 2) surface.",

author = "V.N. Semenov and V.G. Glebovsky and H.H. Brongersma",

year = "1996",

doi = "10.1016/0042-207X(96)00132-7",

language = "English",

volume = "47",

pages = "1193--1196",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier",

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TY - JOUR

T1 - Preferential sputtering and oxidation of Nb-Ta single crystals studied by low-energie ion scattering

AU - Semenov, V.N.

AU - Glebovsky, V.G.

AU - Brongersma, H.H.

PY - 1996

Y1 - 1996

N2 - To study preferential sputtering and oxidation, three monocrystalline NbxTa1 - x(110) alloys (x = 0.25, 0.5, 0.75) as well as pure single crystals of Nb and Ta have been prepared by electron beam floating zone melting (EBFZM) and investigated by low-energy ion scattering (LEIS). After sputter cleaning, LEIS showed the enrichment of tantalum at the surface of all alloys. After exposure to oxygen, linear relationships between the oxygen and both the niobium and tantalum signals demonstrate that matrix effects do not influence the LEIS signals for these systems. The oxygen coverages of the different alloys have been determined by calibration against the Ni(100)-O c(2 × 2) surface.

AB - To study preferential sputtering and oxidation, three monocrystalline NbxTa1 - x(110) alloys (x = 0.25, 0.5, 0.75) as well as pure single crystals of Nb and Ta have been prepared by electron beam floating zone melting (EBFZM) and investigated by low-energy ion scattering (LEIS). After sputter cleaning, LEIS showed the enrichment of tantalum at the surface of all alloys. After exposure to oxygen, linear relationships between the oxygen and both the niobium and tantalum signals demonstrate that matrix effects do not influence the LEIS signals for these systems. The oxygen coverages of the different alloys have been determined by calibration against the Ni(100)-O c(2 × 2) surface.

U2 - 10.1016/0042-207X(96)00132-7

DO - 10.1016/0042-207X(96)00132-7

M3 - Article

VL - 47

SP - 1193

EP - 1196

JO - Vacuum

JF - Vacuum

SN - 0042-207X

IS - 10

ER -

Preferential sputtering and oxidation of Nb-Ta single crystals studied by low-energie ion scattering

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