Original language | English |
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Pages (from-to) | III-IV |
Journal | ECS Transactions |
Volume | 66 |
Issue number | 4 |
Publication status | Published - 24 May 2015 |
Event | 227th Electrochemical Society Meeting (ECS 2015) - Chicago, IL, United States Duration: 24 May 2015 → 28 May 2015 Conference number: 227 |
Preface: Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5
F. Roozeboom, V. Narayanan, K. Kakushima, P.J. Timans, E.P. Gusev, Z. Karim, Stefan De Gendt
Research output: Contribution to journal › Editorial › Academic › peer-review