Preface: Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5

F. Roozeboom, V. Narayanan, K. Kakushima, P.J. Timans, E.P. Gusev, Z. Karim, Stefan De Gendt

Research output: Contribution to journalEditorialAcademicpeer-review

Original languageEnglish
Pages (from-to)III-IV
JournalECS Transactions
Issue number4
Publication statusPublished - 24 May 2015
Event227th Electrochemical Society Meeting (ECS 2015) - Chicago, IL, United States
Duration: 24 May 201528 May 2015
Conference number: 227

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