Preface: Silicon compatible materials, processes, and technologies for advanced integrated circuits and emerging applications 6

F. Roozeboom, V. Narayanan, K. Kakushima, P.J. Timans, E.P. Gusev, Z. Karim, Stefan de Gendt

Research output: Contribution to journalEditorialAcademicpeer-review

Original languageEnglish
Pages (from-to)III-IV
JournalECS Transactions
Issue number4
Publication statusPublished - 2 Jun 2016
Event229th Electrochemical Society Meeting (ECS 2016) - San Diego, United States
Duration: 29 May 20183 Jun 2018
Conference number: 229

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