Preface for the AVS Peter Mark award 40th anniversary collection

E.S. Aydil (Corresponding author), W.M.M. Kessels, Stephanie Law, Mohan Sankaran, Joshua M.O. Zide

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Original language	English
Article number	031601
Number of pages	4
Journal	Journal of Vacuum Science and Technology A
Volume	39
Issue number	3
DOIs	https://doi.org/10.1116/6.0001005
Publication status	Published - 1 May 2021

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title = "Preface for the AVS Peter Mark award 40th anniversary collection",

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AU - Aydil, E.S.

AU - Kessels, W.M.M.

AU - Law, Stephanie

AU - Sankaran, Mohan

AU - Zide, Joshua M.O.

PY - 2021/5/1

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