Preface for the AVS Peter Mark award 40th anniversary collection

E.S. Aydil (Corresponding author), W.M.M. Kessels, Stephanie Law, Mohan Sankaran, Joshua M.O. Zide

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)
34 Downloads (Pure)
Original languageEnglish
Article number031601
Number of pages4
JournalJournal of Vacuum Science and Technology A
Issue number3
Publication statusPublished - 1 May 2021

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