Original language | English |
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Article number | 031601 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology A |
Volume | 39 |
Issue number | 3 |
DOIs | |
Publication status | Published - 1 May 2021 |
Preface for the AVS Peter Mark award 40th anniversary collection
E.S. Aydil (Corresponding author), W.M.M. Kessels, Stephanie Law, Mohan Sankaran, Joshua M.O. Zide
Research output: Contribution to journal › Article › Academic › peer-review
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