Preface for the AVS Peter Mark award 40th anniversary collection

E.S. Aydil (Corresponding author), W.M.M. Kessels, Stephanie Law, Mohan Sankaran, Joshua M.O. Zide

Research output: Contribution to journalArticleAcademicpeer-review

Original languageEnglish
Article number031601
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films
Volume39
Issue number3
DOIs
Publication statusPublished - 1 May 2021

Cite this