Preface: Atomic Layer Deposition Applications 7

Jeffrey W. Elam; Stefan De Gendt; Ana Londergan; Stacey F. Bent; O. van der Straten; Annelies Delabie; F. Roozeboom

Preface: Atomic Layer Deposition Applications 7

Jeffrey W. Elam
, Stefan De Gendt
, Ana Londergan
, Stacey F. Bent
, O. van der Straten
, Annelies Delabie
, F. Roozeboom

Plasma & Materials Processing

Research output: Contribution to journal › Editorial › Academic › peer-review

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Original language	English
Pages (from-to)	III-IV
Journal	ECS Transactions
Volume	41
Issue number	2
Publication status	Published - 1 Jan 2011
Event	220th Electrochemical Society Meeting (ECS 2011) - Westin Boston Waterfront and The Boston Convention/Exhibition Center, Boston, United States Duration: 1 Jan 2011 → … Conference number: 220 https://www.electrochem.org/220

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@article{d0b1b868cdc747d2ab5cd414e17d8124,

title = "Preface: Atomic Layer Deposition Applications 7",

author = "Elam, \{Jeffrey W.\} and \{De Gendt\}, Stefan and Ana Londergan and Bent, \{Stacey F.\} and \{van der Straten\}, O. and Annelies Delabie and F. Roozeboom",

year = "2011",

month = jan,

day = "1",

language = "English",

volume = "41",

pages = "III--IV",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

number = "2",

note = "220th Electrochemical Society Meeting (ECS 2011), ECS 2011 ; Conference date: 01-01-2011",

url = "https://www.electrochem.org/220",

}

TY - JOUR

T1 - Preface

T2 - 220th Electrochemical Society Meeting (ECS 2011)

AU - Elam, Jeffrey W.

AU - De Gendt, Stefan

AU - Londergan, Ana

AU - Bent, Stacey F.

AU - van der Straten, O.

AU - Delabie, Annelies

AU - Roozeboom, F.

N1 - Conference code: 220

PY - 2011/1/1

Y1 - 2011/1/1

UR - http://ecst.ecsdl.org/content/41/2

M3 - Editorial

SN - 1938-5862

VL - 41

SP - III-IV

JO - ECS Transactions

JF - ECS Transactions

IS - 2

Y2 - 1 January 2011

ER -

Preface: Atomic Layer Deposition Applications 7

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