Preface: Atomic Layer Deposition Applications 6

Jeffrey W. Elam, Fred Roozeboom, Annelies Delabie, Oscar Van Der Straten, Stacey F. Bent, Stefan De Gendt, Ana Londergan

Research output: Contribution to journalEditorialAcademicpeer-review

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Original languageEnglish
Pages (from-to)iii
JournalECS Transactions
Volume33
Issue number2
Publication statusPublished - 1 Dec 2010
Event6th Symposium on Atomic Layer Deposition Applications - Las Vegas, NV, United States
Duration: 10 Oct 201015 Oct 2010

Cite this

Elam, J. W., Roozeboom, F., Delabie, A., Van Der Straten, O., Bent, S. F., De Gendt, S., & Londergan, A. (2010). Preface: Atomic Layer Deposition Applications 6 . ECS Transactions, 33(2), iii.