Preface: Atomic Layer Deposition Applications 14

Fred Roozeboom, Stefan De Gendt, Jeffrey W. Elam, Jolien Dendooven, Oscar van der Straten, Chanyuan Liu, A. Illiberi

Research output: Contribution to journalEditorialAcademicpeer-review

Original languageEnglish
Pages (from-to)III-IV
Number of pages2
JournalECS Transactions
Issue number6
Publication statusPublished - 1 Oct 2018
Event234th ECS Meeting / AiMES - Cancun, Cancun, Mexico
Duration: 30 Sept 20184 Oct 2018

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