Preface: Atomic Layer Deposition Applications 11

F. Roozeboom, Stefan De Gendt, Annelies Delabie, Jeffrey W. Elam, O. van der Straten, C. Huffmann

Research output: Contribution to journalEditorialAcademicpeer-review

Original languageEnglish
Pages (from-to)III-IV
JournalECS Transactions
Volume69
Issue number7
Publication statusPublished - 11 Oct 2015
Event228th Electrochemical Society Meeting (ECS 2015) - Phoenix, AZ , United States
Duration: 11 Oct 201515 Oct 2015
Conference number: 228
https://www.electrochem.org/228

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