Preface: atomic layer deposition application 13

F. Roozeboom, Stefan de Gendt, Jeffrey W. Elam, O. van der Straten, J. Dendooven, C. Liu

Research output: Contribution to journal › Editorial › Academic › peer-review

Cite this

@article{61a43ce835204f408d2dbf7c33dc806e,

title = "Preface: atomic layer deposition application 13",

author = "F. Roozeboom and \{de Gendt\}, Stefan and Elam, \{Jeffrey W.\} and \{van der Straten\}, O. and J. Dendooven and C. Liu",

year = "2017",

month = oct,

day = "1",

language = "English",

volume = "80",

pages = "III--IV",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

number = "3",

}