Preface

K. Kondo; R. N. Akolkar; D. Misra; F. Roozeboom; M. Koyanagi

Preface

K. Kondo, R. N. Akolkar, D. Misra, F. Roozeboom, M. Koyanagi

Plasma & Materials Processing

Research output: Contribution to journal › Editorial › Academic › peer-review

Original language	English
Journal	ECS Transactions
Volume	41
Issue number	43
Publication status	Published - 1 Dec 2012
Event	Processing Materials of 3D Interconnects, Damascene and Electronics Packaging - 220th ECS Meeting - Boston, MA, United States Duration: 9 Oct 2011 → 14 Oct 2011

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title = "Preface",

author = "K. Kondo and Akolkar, {R. N.} and D. Misra and F. Roozeboom and M. Koyanagi",

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TY - JOUR

T1 - Preface

AU - Kondo, K.

AU - Akolkar, R. N.

AU - Misra, D.

AU - Roozeboom, F.

AU - Koyanagi, M.

PY - 2012/12/1

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M3 - Editorial

AN - SCOPUS:84879329437

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T2 - Processing Materials of 3D Interconnects, Damascene and Electronics Packaging - 220th ECS Meeting

Y2 - 9 October 2011 through 14 October 2011

ER -

Preface

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