Preface

Fred Roozeboom; Stefan De Gendt; Jeffrey W. Elam; Jolien Dendooven; Oscar van der Straten; Chanyuan Liu; Andrea Illibcri

Preface

Fred Roozeboom, Stefan De Gendt, Jeffrey W. Elam, Jolien Dendooven, Oscar van der Straten, Chanyuan Liu, Andrea Illibcri

Plasma & Materials Processing

Research output: Contribution to journal › Editorial › Academic › peer-review

Original language	English
Pages (from-to)	iii-iv
Journal	ECS Transactions
Volume	86
Issue number	6
Publication status	Published - 4 Oct 2018
Event	Symposium on Atomic Layer Deposition Applications 14 - AiMES 2018, ECS and SMEQ Joint International Meeting - Cancun, Mexico Duration: 30 Sep 2018 → 4 Oct 2018

Access to Document

http://ecst.ecsdl.org/content/86/6/local/front-matter.pdf

Cite this

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title = "Preface",

author = "Fred Roozeboom and {De Gendt}, Stefan and Elam, {Jeffrey W.} and Jolien Dendooven and {van der Straten}, Oscar and Chanyuan Liu and Andrea Illibcri",

year = "2018",

month = oct,

day = "4",

language = "English",

volume = "86",

pages = "iii--iv",

journal = "ECS Transactions",

issn = "1938-6737",

publisher = "Electrochemical Society, Inc.",

number = "6",

note = "Symposium on Atomic Layer Deposition Applications 14 - AiMES 2018, ECS and SMEQ Joint International Meeting ; Conference date: 30-09-2018 Through 04-10-2018",

}

TY - JOUR

T1 - Preface

AU - Roozeboom, Fred

AU - De Gendt, Stefan

AU - Elam, Jeffrey W.

AU - Dendooven, Jolien

AU - van der Straten, Oscar

AU - Liu, Chanyuan

AU - Illibcri, Andrea

PY - 2018/10/4

Y1 - 2018/10/4

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M3 - Editorial

AN - SCOPUS:85058316661

VL - 86

SP - iii-iv

JO - ECS Transactions

JF - ECS Transactions

SN - 1938-6737

IS - 6

T2 - Symposium on Atomic Layer Deposition Applications 14 - AiMES 2018, ECS and SMEQ Joint International Meeting

Y2 - 30 September 2018 through 4 October 2018

ER -